A MEMS-Assisted Temperature Sensor With 20-µK Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2. | 0 | 0.34 | 2017 |
11.1 Dual-MEMS-resonator temperature-to-digital converter with 40 K resolution and FOM of 0.12pJK2. | 1 | 0.38 | 2016 |
A 3 ppm 1.5 × 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator | 19 | 2.12 | 2015 |
12.9 A 1.55×0.85mm2 3ppm 1.0μA 32.768kHz MEMS-based oscillator | 0 | 0.34 | 2014 |
A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With < ±0.5-ppm Frequency Stability and < 1-ps Integrated Jitter. | 0 | 0.34 | 2013 |
Session 22 overview: Sensors & displays. | 0 | 0.34 | 2013 |
A temperature-to-digital converter for a MEMS-based programmable oscillator with better than ±0.5ppm frequency stability. | 3 | 0.94 | 2012 |
Silicon MEMS Oscillators for High-Speed Digital Systems | 1 | 0.48 | 2010 |