Author Info
Name
Affiliation
Papers
N. NOMURA
MATSUSHITA ELECT IND CO LTD,MATSUSHITA SOFT RES INC,MORIGUCHI,OSAKA 570,JAPAN
1
Collaborators
Citations 
PageRank 
4
0
0.34
Referers 
Referees 
References 
0
0
0
Title
Citations
PageRank
Year
A novel hierarchical approach for proximity effect correction in electron beam lithography00.341993