Integrated Control Design of Pneumatic Servo Table Considering the Dynamics of Pipelines and Servo Valve. | 0 | 0.34 | 2011 |
Ultra Precise Positioning of a Stage Driven by Pneumatic Bellows. | 0 | 0.34 | 2011 |
Effect of Servo Valve Dynamic on Precise Position Control of a Pneumatic Servo Table. | 0 | 0.34 | 2008 |