Author Info
Name
Affiliation
Papers
XUANBO CHEN
Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics, Beijing Institute of Technology, Beijing, China
1
Collaborators
Citations 
PageRank 
4
0
0.34
Referers 
Referees 
References 
0
0
0
Title
Citations
PageRank
Year
Gradient-Based Source Mask Optimization for Extreme Ultraviolet Lithography00.342019