Name
Abstract | ||
|---|---|---|
Distributed simulation promises benefits in large-scale simulations, such as in high fidelity simulation of 300 mm wafer fabs, although these benefits have been hard to achieve in practice. This paper examines the fundamentals of distributed simulation, and proposes a hierarchical approach to distributed wafer fab simulation, which has the potential to achieve significant reduction in model execution time. |
Year | DOI | Venue |
|---|---|---|
2007 | 10.1109/WSC.2007.4419802 | Winter Simulation Conference |
Keywords | Field | DocType |
production engineering computing,high fidelity simulation,hierarchical approach,wafer fabs,large-scale simulation,large-scale simulations,semiconductor device manufacture,hierarchical distributed simulation,model execution time,digital simulation,significant reduction,wafer-scale integration,wafer fab simulation,distributed processing,wafer fab | High fidelity,Wafer,Computer science,Simulation,Wafer fabrication,Execution time,Wafer-scale integration | Conference |
ISBN | Citations | PageRank |
978-1-4244-1306-5 | 0 | 0.34 |
References | Authors | |
3 | 2 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Sheng Xu | 1 | 507 | 71.47 |
| Leon F. McGinnis | 2 | 494 | 50.09 |