Paper Info
Title
An Ontology for Production Control of Semiconductor Manufacturing Processes
Abstract
In this paper, we describe an ontology for a hierarchically organized production control system in semiconductor manufacturing. The semiconductor manufacturing domain is characterized by reentrant product flows, sequence dependent setup-times, prescribed due-dates, a diverse product mix, a mix of different process types including batch processes and preventive maintenance issues because of complex technological processes. Starting from a hierarchical decomposition of the manufacturing system, we use an agent-based architecture for implementing the resulting production control system. In order to coordinate the autonomous entities of the hierarchy, we suggest an ontology that is appropriate to the hierarchical control approach. We illustrate the use of the suggested ontology.
Year
DOI
Venue
2003
10.1007/978-3-540-39869-1_14
LECTURE NOTES IN ARTIFICIAL INTELLIGENCE
Keywords
Field
DocType
semiconductor manufacturing,batch process,preventive maintenance,control system
Production manager,Hierarchical control system,Ontology,Production control,Process ontology,Computer science,Operations research,Computer-integrated manufacturing,Scheduling (production processes),Manufacturing engineering,Process control,Distributed computing
Conference
Volume
ISSN
Citations 
2831
0302-9743
5
PageRank 
References 
Authors
0.57
7
2
Name
Order
Citations
PageRank
Lars Mönch11034124.98
Marcel Stehli2446.27