Name
Abstract | ||
|---|---|---|
A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The refer- ence is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement re- sults. |
Year | DOI | Venue |
|---|---|---|
2005 | 10.1109/TIM.2004.843097 | IEEE T. Instrumentation and Measurement |
Keywords | Field | DocType |
capacitors,feedback,measurement standards,reference circuits,silicon-on-insulator,voltage measurement,DC voltage reference,MEMS,capacitive microelectromechanical system,capacitive sensors,improved feedback electronics,micromachining,micromechanical moving plate capacitor,silicon-on-insulator process,Capacitive sensors,feedback electronics,microelectromechanical systems (MEMS),micromachining,silicon-on-insulator (SOI) | Silicon on insulator,Capacitor,Microelectromechanical systems,Voltage reference,Electronic engineering,Capacitive sensing,Control engineering,Electronics,Electrical engineering,Mathematics | Journal |
Volume | Issue | ISSN |
54 | 2 | 0018-9456 |
Citations | PageRank | References |
1 | 0.41 | 4 |
Authors | ||
6 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Anu Kärkkäinen | 1 | 1 | 0.41 |
| Shakil A. Awan | 2 | 1 | 0.41 |
| Jukka Kyynäräinen | 3 | 1 | 0.41 |
| Panu Pekko | 4 | 1 | 0.41 |
| Aarne S. Oja | 5 | 1 | 0.41 |
| Heikki Seppä | 6 | 15 | 2.55 |