Paper Info
Title
A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor
Abstract
A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor is reported for the first time. It is a refractive-index sensitive optical sensor. The transducing signal varies upon the changes of the effective index of refraction in the sensing area, which is the Fabry-Perot cavity. This chemo/biosensor is made with PDMS and glass. Specifically, the micromachined Fabry-Perot interferometer (μFPI) and cavity is fabricated by bonding glass and the soft-lithographically patterned PDMS. Several chemicals have been detected with the prototype devices. Measurements show that at least 10ppm chemicals can be detected even without any performance optimization of the devices.
Year
DOI
Venue
2009
10.1109/NEMS.2009.5068554
NEMS
Keywords
Field
DocType
white-light source,bonding glass,micromachined fabry-perot interferometer,refractive-index sensitive optical sensor,performance optimization,transducing signal,prototype device,fabry-perot chemo,fabry-perot cavity,effective index,fabry perot interferometer,optical fibers,biosensor,fabry perot,polymers,chemosensor,refractive index,index of refraction,sensors,micromachining,optical sensor,biosensors
Optical fiber,Analytical chemistry,Polymer,Fabry–Pérot interferometer,Surface micromachining,Optics,Interferometry,White light,Biosensor,Materials science,Optoelectronics,Refractive index
Conference
ISSN
Citations 
PageRank 
2474-3747
0
0.34
References 
Authors
1
3
Name
Order
Citations
PageRank
Tianhua Zhang142.43
Zhongcheng Gong201.35
Long Que321.80