Title
Influence Of Ohmic Contact Resistance On Transconductance In Algan/Gan Hemt
Abstract
The correlation between ohmic contact resistivity (p(c)) and transconductance (g(m)) in AlGaN/GaN high-electron-mobility transistors (HEMTs) was investigated. To characterize p(c) precisely, we fabricated a circular transmission line model (c-TLM) pattern adjoined to a field-effect transistor (FET) pattern on an HEMT. By measuring ohmic contact resistance and sheet resistance using the adjoined c-TLM, intrinsic transconductance (g(m0)), which is not influenced by the source resistance, can be estimated. The g(m0) thus obtained is between 179 and 206 mS/mm. Then, it became possible to calculate the correlation between g(m) and p(c). We found that p(c) should be below 10(-5) Omega cm(2) for the improvement of g(m) in AlGaN/GaN HEMT when R-s/h = 400 Q/square.
Year
DOI
Venue
2006
10.1093/ietele/e89-c.7.1064
IEICE TRANSACTIONS ON ELECTRONICS
Keywords
Field
DocType
AlGaN/GaN HEMT, contact resistance, transconductance
Contact resistance,Field-effect transistor,Electronic engineering,Sheet resistance,Transconductance,Engineering,Transistor,High-electron-mobility transistor,Electrical resistivity and conductivity,Ohmic contact
Journal
Volume
Issue
ISSN
E89C
7
1745-1353
Citations 
PageRank 
References 
0
0.34
0
Authors
8