Paper Info
Title
Structured synthesis of MEMS using evolutionary approaches
Abstract
In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped-parameter model synthesis is the first step of the MEMS synthesis process. At the system level, an approach combining bond graphs and genetic programming can lead to satisfactory design candidates as system-level models that meet the predefined behavioral specifications for designers to trade off. Then at the physical layout synthesis level, the selection of geometric parameters for component devices and other design variables is formulated as a constrained optimization problem and addressed using a constrained genetic algorithm approach. A multiple-resonator microsystem design is used to illustrate the integrated design automation idea using these evolutionary approaches.
Year
DOI
Venue
2008
10.1016/j.asoc.2007.04.001
Appl. Soft Comput.
Keywords
Field
DocType
genetic programming,design variable,multiple-resonator microsystem design,integrated design automation idea,structured mems design process,mems synthesis process,evolutionary approach,mems synthesis,structured synthesis,satisfactory design candidate,genetic algorithm,physical layout synthesis level,hierarchical synthesis process,typical mems design,bond graphs,bond graph,design process
Microsystem,Mathematical optimization,Automation,Genetic programming,Integrated design,Bond graph,Hierarchy,Design process,Mathematics,Genetic algorithm
Journal
Volume
Issue
ISSN
8
1
Applied Soft Computing Journal
Citations 
PageRank 
References 
12
1.18
5
Authors
5
Name
Order
Citations
PageRank
Zhun Fan132435.30
Jiachuan Wang2424.01
Sofiane Achiche37814.65
Erik Goodman414515.19
Ronald Rosenberg5151.63