Title
High Mobility Channel Cmos Technologies For Realizing High Performance Lsi'S
Abstract
Saturation of CMOS performance has been evident in the present 45/32 nm technology node, because of a variety of physical limitations on the miniaturization. Thus, channel engineering, including the enhancement of drive current due to high mobility channel materials and with robustness against short channel effects and characteristic variation due to multi-gate structures, has currently been recognized as mandatory for high performance CMOS. In this paper, we report our approaches to further improvement of MOSFETs by using strained-Si, SiGe, Ge and semiconductor channels on the Si CMOS platform with an emphasis on the combination of ultra-thin body and multi-gate structures.
Year
DOI
Venue
2009
10.1109/CICC.2009.5280866
PROCEEDINGS OF THE IEEE 2009 CUSTOM INTEGRATED CIRCUITS CONFERENCE
Keywords
Field
DocType
strain,effective mass,cmos integrated circuits,nanotechnology,logic gates,short channel effect,silicon
Logic gate,Computer science,Communication channel,Electronic engineering,CMOS,Robustness (computer science),Miniaturization,MOSFET,Electrical engineering,Semiconductor,Silicon-germanium
Conference
Citations 
PageRank 
References 
0
0.34
0
Authors
1
Name
Order
Citations
PageRank
Shinichi Takagi139.69