Paper Info
Title
A Methodology for Process Design Simulators of MEMS Based on VRML and JAVA
Abstract
Abstract: The paper presents an efficient way to produce pedagogical, fully interactive and animated 3D process design simulators for MEMS. The aim of such simulators is to make the student learn the logical suite of process design steps that have to be taken to produce correct MEMS. By means of VRML, the learner can visualize the studied MEMS device at any stage of its fabrication from any angle. The associated Java program checks that the actions performed by the student are done in the right order with respect to time.
Year
DOI
Venue
2001
10.1109/MSE.2001.932401
MSE
Keywords
Field
DocType
Java,computer based training,electronic design automation,electronic engineering education,micromechanical devices,virtual reality languages,Java,MEMS,VRML,animated 3D process design simulators,process design simulators,process design steps,students
Suite,VRML,Microelectromechanical systems,Java program,Computer science,Electronic engineering education,Electronic design automation,Process design,Java,Computer engineering
Conference
ISBN
Citations 
PageRank 
0-7695-1156-2
0
0.34
References 
Authors
0
1
Name
Order
Citations
PageRank
François Pêcheux112116.70