Title
Scanning and measurement of carbon nanofiber nanoelectrode arrays using Atomic Force Microscopy
Abstract
One of the major limitations in the development of ultrasensitive electrochemical biosensors based on one-dimensional nanostructure is the difficulty involved with reliably fabricating nanoelectrode arrays (NEAs). In previous work, a simple, robust and scalable wafer-scale fabrication method to produce multiplexed biosensors is introduced. Each sensor chip consists of nine individually addressable arrays that uses electron beam patterned vertically aligned carbon nanofibers (VACNFs) as the sensing element. To ensure nanoelectrode behavior with higher sensitivity, VACNFs were precisely grown on 100 nm Ni dots with 1 ¿m spacing on each micro pad. However, in order to examine the quality and measure the height and diameter of the VACNFs, some surface detection and measurement tool at the nanoscale level is needed. In this paper, we introduce an approach to measure these nano-scale features through atomic force microscope (AFM). With this method, both the 2D and 3D images of sample surface are generated and the sizes of carbon nanofibers and cavities are obtained. Furthermore, statistical analysis is carried out to enable improvement of VACNFs growth and fabrication.
Year
DOI
Venue
2009
10.1109/ROBIO.2009.5420649
ROBIO
Keywords
Field
DocType
atomic force microscopy,nanosensors,carbon nanofibers,nanobiotechnology,scalable wafer-scale fabrication method,carbon fibres,vertically aligned carbon nanofibers,addressable array,statistical analysis,surface detection,electrochemical electrodes,nanofibres,multiplexed biosensors,biological techniques,c,carbon nanofiber nanoelectrode,one-dimensional nanostructure,nanoelectrode behavior,atomic force microscope,electrochemical sensors,sample surface,vacnfs growth,ultrasensitive electrochemical biosensors,carbon nanofiber nanoelectrode arrays,nanoelectrode array,electron beam,force,carbon nanofiber,3d imaging,chip,surfaces
Carbon nanofiber,Nanotechnology,Nanoscopic scale,Nanosensor,Chip,Engineering,Biosensor,Nanobiotechnology,Nanostructure,Fabrication
Conference
ISBN
Citations 
PageRank 
978-1-4244-4775-6
0
0.34
References 
Authors
0
5
Name
Order
Citations
PageRank
Zhuxin Dong194.83
Uchechukwu C. Wejinya2157.71
Holly D. Tourtillott300.34
Imad H. Elhajj431053.65
Meyya Meyyappan500.68