Title
Photoluminescence of Ge nano-crystallites embedded in silicon oxide
Abstract
Photoluminescence (PL), transmission electron microscopy, Raman scattering spectra and extended X-ray absorption fine structure have been investigated in silicon oxide films enriched by Ge in as-grown state and after their thermal annealing at 800 °C. The dependences of PL peculiarities on the concentration of Ge, as well as on the existence (or absence) of Ge nano-crystallites in silicon oxide films are analyzed.
Year
DOI
Venue
2003
10.1016/S0026-2692(03)00043-0
Microelectronics Journal
Keywords
Field
DocType
Nano-crystallites,Photoluminescence,Transmission electron microscopy
Crystallite,Transmission electron microscopy,Raman scattering,Spectral line,Silicon oxide,Annealing (metallurgy),Engineering,Nano-,Optoelectronics,Condensed matter physics,Photoluminescence
Journal
Volume
Issue
ISSN
34
5
0026-2692
Citations 
PageRank 
References 
0
0.34
0
Authors
4
Name
Order
Citations
PageRank
T.V. Torchynska112.88
G. Polupan200.68
J. Palacios Gomez300.34
A.V. Kolobov400.34