Name
Abstract | ||
|---|---|---|
In this paper, we present design and fabrication of a temperature sensor of Pt thin film for real time accurately measuring temperature in tumor hyperthermia. Processing parameters for using magnetron sputtering to deposit Pt thin film are obtained through many trial processes in order to get the excellent thin film surface morphology and sensing performance. With finite element analysis in ANSYS, it confirms that the sensor has a fast dynamic response in two special contact situations between tumor and sensor in hyperthermia. The tested results show the developed sensor has a good linear output relationship and its TCR reaches 0.0031/°C, which is close to the industry standard value of the bulk Pt resistor sensor. ©2010 IEEE. |
Year | DOI | Venue |
|---|---|---|
2010 | 10.1109/NEMS.2010.5592468 | NEMS |
Keywords | Field | DocType |
biomems,finite element analysis,temperature measurement,microfabrication,platinum,films,thin film,magnetron sputtering,sputter deposition,real time,finite element methods | Hyperthermia,Composite material,Sputter deposition,Finite element method,Resistor,Thin film,Temperature measurement,Materials science,Fabrication,Microfabrication | Conference |
Volume | Issue | Citations |
null | null | 0 |
PageRank | References | Authors |
0.34 | 0 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Liwei Lin | 1 | 122 | 28.76 |
| Qiang Pei | 2 | 0 | 0.34 |
| Jiashan Xu | 3 | 0 | 1.35 |
| Hang Guo | 4 | 2 | 5.48 |