Name
Abstract | ||
|---|---|---|
A thin-film inductor with Ni0.3Cu0.1Zn0.6Fe2O4 film for the RF range is fabricated by using IC compatible processes, which is composed of SiO2 insulating layer / NiCuZn ferrite film layer / SiO2 insulating layer / Cu coils. The magnetic properties of Ni0.3Cu0.1Zn0.6Fe2O4 thin film are discussed. High frequency performances of the micro-inductor are measured using network analyzer from 50MHz to 9GHz. The inductance (L) of the micro-inductor is 1.976nH and the quality factor (Q) is 5.06 at 1GHz. Compared with micro-inductor that has same structure but no magnetic film, L and Q are enhanced about 7.6% and 8.4%, respectively. The inductance (L) of the micro-inductor is 2.008nH and the quality factor (Q) is 9.19 at 2GHz. Compared with micro-inductor that has same structure but no magnetic film, L and Q are enhanced about 7.7% and 3.6%, respectively. With the improvement of L and Q, the size of ferrite thin-film inductor can be reduced effectively. |
Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/NEMS.2011.6017417 | NEMS |
Keywords | Field | DocType |
rf,q-factor,ferrite film,quality factor,nicuzn ferrite film,ni0.3cu0.1zn0.6fe2o4,nickel compounds,magnetic property,copper compounds,radiofrequency integrated circuits,micro inductor,microinductor,frequency 50 mhz to 9 ghz,frequency 2 ghz,network analyzer,silicon compounds,sio2 insulating layer,frequency 1 ghz,rf ic,thin-film inductor,inductance,thin film inductors,ferrites,sio2,high frequency,q factor,thin film | Ferrite (magnet),Network analyzer (electrical),Composite material,Q factor,Analytical chemistry,Inductance,Magnetic films,Nickel compounds,Inductor,Thin film,Materials science | Conference |
Volume | Issue | ISBN |
null | null | 978-1-61284-775-7 |
Citations | PageRank | References |
0 | 0.34 | 1 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Feng Li | 1 | 90 | 21.99 |
| Shuangli Ye | 2 | 0 | 0.68 |
| Shifeng Li | 3 | 2 | 1.06 |
| Xinzhi Shi | 4 | 0 | 0.68 |