Name
Abstract | ||
|---|---|---|
We propose an Integer Programming (IP) framework to undertake the dedicated photolithography machine constraint in semiconductor manufacturing. The constraint is one of the new challenges set by the process engineer in semiconductor manufacturing due to natural bias of photolithography machines. Previous researches either did not take the constraint into account or the proposed heuristic approach might not efficiently fit the fast-changing market of semiconductor manufacturing. In this paper, the proposed IP framework provides an approach to minimize the production cost in an efficient time. We also present the experiments to validate the approach. |
Year | DOI | Venue |
|---|---|---|
2008 | 10.1109/ICTAI.2008.85 | ICTAI (1) |
Keywords | Field | DocType |
natural bias,proposed ip framework,proposed heuristic approach,fast-changing market,photolithography machine,semiconductor manufacturing,dedicated photolithography machine constraint,dedicated machine constraint,new challenge,efficient time,integer programming,process engineering,job shop scheduling,photolithography,manufacturing,lithography,scheduling | Constraint satisfaction,Mathematical optimization,Heuristic,Job shop scheduling,Computer science,Scheduling (computing),Semiconductor device fabrication,Constraint programming,Photolithography,Integer programming,Artificial intelligence,Machine learning | Conference |
ISSN | Citations | PageRank |
1082-3409 | 1 | 0.37 |
References | Authors | |
12 | 4 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Huy Nguyen Anh Pham | 1 | 16 | 2.92 |
| Arthur Shr | 2 | 3 | 1.50 |
| Peter P. Chen | 3 | 1027 | 1122.69 |
| Alan Liu | 4 | 149 | 17.19 |