Name
Abstract | ||
|---|---|---|
Spatially resolved photoluminescence is used as a nondestructive tool to characterize semiconductor epitaxial wafers with a resolution better than the device dimensions. In this paper, we describe a novel photoluminescence measurement setup using fiber optic techniques for luminescence excitation and detection in a very simple confocal arrangement. A final spatial resolution as small as 5 /spl mu/... |
Year | DOI | Venue |
|---|---|---|
1999 | 10.1109/19.755058 | IEEE Transactions on Instrumentation and Measurement |
Keywords | Field | DocType |
Optical fibers,Photoluminescence,Spatial resolution,Optical materials,Optical filters,Stimulated emission,Luminescence,Optical devices,Semiconductor materials,Quality control | Wafer,Optical fiber,Luminescence,Nondestructive testing,Optics,Excitation,Optoelectronics,Image resolution,Mathematics,Semiconductor,Photoluminescence | Journal |
Volume | Issue | ISSN |
48 | 1 | 0018-9456 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| S. Banerjee | 1 | 0 | 0.34 |
| Chung-En Zah | 2 | 0 | 0.68 |
| R. Bhat | 3 | 0 | 0.34 |
| C. Caneau | 4 | 0 | 0.34 |