Name
Year | DOI | Venue |
|---|---|---|
2010 | 10.1109/NEMS.2010.5592170 | NEMS |
Keywords | Field | DocType |
boron,coatings,crystallography,doping,gears,micromachining,silicon compounds,boron dopant,bulk micromachining process,crystallographic shape removal technology,ethylenediamine-pyrocatechol-water etchant,microscale silicon dioxide gear fabrication,polyimide coating,silicon substrate,Bulk micromachining,Microelectromechanical systems,micro gear,silicon dioxide | Wafer,Composite material,Surface micromachining,Bulk micromachining,Etching (microfabrication),Coating,Hybrid silicon laser,Silicon oxide,Metallurgy,Materials science,Optoelectronics,Silicon | Conference |
Citations | PageRank | References |
3 | 0.98 | 0 |
Authors | ||
6 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| D. Um | 1 | 17 | 5.27 |
| B. Asiabanpour | 2 | 3 | 0.98 |
| D. Foor | 3 | 3 | 0.98 |
| M. Kurtz | 4 | 3 | 0.98 |
| M. Tellers | 5 | 3 | 0.98 |
| M. T. McGregor | 6 | 3 | 0.98 |