Paper Info
Title
Design of a novel MEMS IDT dual axes surface acoustic wave gyroscope
Abstract
The configuration of a novel MEMS interdigital transducer (IDT) dual-axis surface acoustic wave (SAW) gyroscope is presented in this paper. There have been an increasing demand for gyroscopes with small size and low cost in military and commercial systems, however rotator gyroscopes, laser gyroscopes, fiber optic gyroscopes, and silicon-based MEMS gyroscopes can't meet the demand. Although the MEMS IDT SAW gyroscope previously is without a suspended structure, it can only detect the angular velocity of one axis, and two gyroscopes of the kind are used to measure the angular velocity of two axes which can be detected by a MEMS IDT dual-axis SAW gyroscope. The configuration and working principles of the gyroscope were explored. The 95.9 MHz gyroscope sample fabricated on the 128deg YX-LiNbO3 substrate was primarily designed.
Year
DOI
Venue
2009
10.1109/NEMS.2009.5068717
NEMS
Keywords
Field
DocType
fiber optic gyroscope,interdigital transducers,novel mems idt,yx-linbo3 substrate,microsensors,surface acoustic wave resonator,mems idt dual-axis,laser gyroscope,silicon-based mems gyroscope,dual axes surface acoustic wave gyroscope,angular velocity,dual axes gyroscope,mems idt,effect of coriolis force,increasing demand,mhz gyroscope sample,rotator gyroscope,acoustic wave gyroscope,interdigital transducer,metallic dot array,gyroscopes,surface acoustic wave sensor,dual axis,force,acoustic waves,surface acoustic wave devices,surface acoustic wave,standing wave
Vibrating structure gyroscope,Rate integrating gyroscope,Gyroscope,Fibre optic gyroscope,Surface acoustic wave sensor,Surface acoustic wave,Optics,Ring laser gyroscope,Interdigital transducer,Acoustics,Materials science
Conference
Volume
Issue
ISSN
null
null
2474-3747
ISBN
Citations 
PageRank 
978-1-4244-4630-8
2
0.54
References 
Authors
1
5
Name
Order
Citations
PageRank
Qinghui Liu175.41
Xuezhong Wu22712.46
Di Di320.88
Peitao Dong483.90
Dapeng Fan530.93