Name
Abstract | ||
|---|---|---|
To add more functionalities to microelectronic circuits, microsystems offer growing number of applications. An advanced practical work that combines simulation and optical characterization of micro-systems is presented in this paper. It emphases through simulation and characterization results the different characteristics of some of the most utilized microsystems. |
Year | DOI | Venue |
|---|---|---|
2007 | 10.1109/MSE.2007.75 | MSE |
Keywords | Field | DocType |
utilized microsystems,characterization result,different characteristic,advanced practical work,optical characterization,resonance,modal analysis,optical interferometry,microelectronics,silicon | Microsystem,Microelectronic circuits,Microelectronics,Interferometry,Electronic engineering,Engineering,Modal analysis | Conference |
ISBN | Citations | PageRank |
0-7695-2849-X | 0 | 0.34 |
References | Authors | |
0 | 4 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Bogdan Bercu | 1 | 0 | 0.68 |
| Laurent Montes | 2 | 0 | 1.01 |
| Panagiota Morfouli | 3 | 1 | 1.64 |
| Nathalie Mathieu | 4 | 1 | 1.30 |