Name
Title | ||
|---|---|---|
Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers. |
Abstract | ||
|---|---|---|
This paper reports a novel top-down/bottom-up combined resonant microcantilever chemical sensor, where the nanosensing material of a functionalized mesoporous thin film (MTF) is directly self-assembled on the sensing region of the integrated microcantilever. By using the batch-producible nano-on-micro construction technique, a large number of such sensors can be batch fabricated with uniform perfo... |
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/TIE.2011.2173094 | IEEE Transactions on Industrial Electronics |
Keywords | Field | DocType |
Gas detectors,Chemical sensors,Mesoporous materials,Surface treatment,Resonant frequency,Micromechanical devices,Thin films,Microelectromechanical systems | Nanotechnology,Nanosensor,Gravimetric analysis,Cantilever,Self-assembly,Mesoporous material,Nanolithography,Engineering,Thin film,Microfabrication | Journal |
Volume | Issue | ISSN |
59 | 12 | 0278-0046 |
Citations | PageRank | References |
8 | 0.90 | 4 |
Authors | ||
5 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Haitao Yu | 1 | 10 | 2.29 |
| Pengcheng Xu | 2 | 56 | 5.34 |
| Xiaoyuan Xia | 3 | 9 | 1.26 |
| Dong-Weon Lee | 4 | 12 | 3.07 |
| Xinxin Li | 5 | 31 | 11.80 |