Title
Effect of planarity on the 3D integration in 3-D integrated CMOS image sensor
Abstract
In this work, some of the tradeoffs that need to be considered in optimizing a back-illuminated (BSI) sensor were described. The manufacturing feasibility of a BSI CMOS image sensor was demonstrated and compared between the front-illuminated (FSI) and back-illuminated (BSI) versions of the sensor with the same fabrication process. 3D integration processes were evaluated to get stable performance of BSI CMOS image sensor.The broadband quantum efficiency (81% for BSI) improved 2.7 times over FSI sensitivity.
Year
DOI
Venue
2011
10.1109/3DIC.2012.6263018
3DIC
Keywords
Field
DocType
efficiency 81 percent,cmos image sensors,broadband quantum efficiency,planarity effect,back illuminated image sensor,three-dimensional integrated circuits,manufacturing feasibility,circuit optimisation,integrated circuit bonding,3d integrated bsi cmos image sensor,3d integration processes,fsi sensor,front-illuminated sensor
Camera module,Wafer bonding,Image sensor,Electronic engineering,Chip,CMOS sensor,Lens (optics),Pixel,Engineering,Image resolution,Optoelectronics
Conference
ISBN
Citations 
PageRank 
978-1-4673-2189-1
0
0.34
References 
Authors
0
9
Name
Order
Citations
PageRank
Nam Hee Kwon100.34
S. M. Hong282.97
Yong-Won Cha300.34
Sun Jae Lee400.34
Han Gyul Lee500.34
Areum Kim600.68
Soo Won Kim742.28
Chang Hyun Kim84721.59
Sung Gyu Pyo900.34