Paper Info
Title
Scratch of submicron grooves on aluminum film with AFM diamond tip
Abstract
In this paper nanomachining on aluminum film using an atomic force microscope (AFM) with commercial diamond tip is investigated. To obtain nano scale groove structure, experiments of nanomachining on aluminum films under various machining conditions were conducted. Then the cross sections of the grooves were measured by AFM, which indicates that using diamond tip, deep grooves on the aluminum film can be made easily. The experimental results also show that the material properties of the coating/substrate are elastic-plastic nearly following a bilinear law with isotropic strain hardening. By penetrating the aluminum film, the submicron grooves are produced on the aluminum film and silicon substrate. As aluminum film is a good mask for etching silicon and silica, it provides a low cost nano fabrication technique compared to traditional nano photolithography, and has a good prospect in nano imprint template fabrication and high end photomask repair.
Year
DOI
Venue
2009
10.1109/NEMS.2009.5068738
NEMS
Keywords
Field
DocType
atomic force microscopy,afm,traditional nano photolithography,submicron groove,isotropic strain hardening,nanotechnology,good prospect,diamond tip,nanomachining,nano imprint template fabrication,scratch,aluminium,nano scale groove structure,aluminum film,good mask,low cost nano fabrication,metallic thin films,submicron grooves scratch,etching,micromachining,al,etching silicon,commercial diamond tip,submicron grooves,afm diamond tip,films,force,silicon,aluminum,strain hardening,machining,material properties,lithography,atomic force microscope,cross section
Diamond,Composite material,Surface micromachining,Photomask,Coating,Photolithography,Nano-,Materials science,Silicon,Fabrication
Conference
ISSN
ISBN
Citations 
2474-3747
978-1-4244-4630-8
0
PageRank 
References 
Authors
0.34
0
5
Name
Order
Citations
PageRank
Ping Peng100.34
Tielin Shi29017.20
Guanglan Liao3369.69
Zirong Tang442.90
Chang Liu500.34