Name
Title | ||
|---|---|---|
CMOS compatible ALD high-k double slot grating couplers for on-chip optical interconnects. |
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/ESSDERC.2012.6343341 | ESSDERC |
Keywords | Field | DocType |
etching,atomic layer deposition,cmos integrated circuits,silicon on insulator | Silicon on insulator,Atomic layer deposition,Etching,Grating,Waveguide,Optics,Electronic engineering,CMOS,Thin layers,Cladding (metalworking),Materials science | Conference |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Maziar M. Naiini | 1 | 0 | 0.34 |
| Christoph Henkel | 2 | 0 | 0.68 |
| B. Gunnar Malm | 3 | 4 | 2.02 |
| Mikael Östling | 4 | 1 | 3.36 |