Title
Recent Research and Emerging Challenges in Physical Design for Manufacturability/Reliability
Abstract
As IC process geometries scale down to the nanometer territory, the industry faces severe challenges of manufacturing limitations. To guarantee yield and reliability, physical design for manufacturability and reliability has played a pivotal role in resolution and thus yield enhancement for the imperfect manufacturing process. In this paper, we introduce major challenges arising from nanometer process technology, survey key existing techniques for handling the challenges, and provide some future research directions in physical design for manufacturability and reliability.
Year
DOI
Venue
2007
10.1109/ASPDAC.2007.357992
ASP-DAC
Keywords
Field
DocType
severe challenge,physical design,pivotal role,imperfect manufacturing process,nanometer process technology,recent research,nanometer territory,major challenge,ic process geometries,survey key,future research direction,reliability,manufacturability,design for manufacture,nanotechnology
Systems engineering,Manufacturing engineering,Physical design,Engineering,Design for manufacturability,Manufacturing process
Conference
ISSN
ISBN
Citations 
2153-6961
1-4244-0629-3
6
PageRank 
References 
Authors
0.67
33
6
Name
Order
Citations
PageRank
Chung-Wei Lin119520.34
Ming-Chao Tsai2483.73
Kuang-Yao Lee31388.34
Tai-Chen Chen4877.99
Ting-Chi Wang551141.34
Yao-Wen Chang63437253.54