Paper Info
Title
Humidity sensitivity of multi-walled carbon nanotube networks deposited by dielectrophoresis.
Abstract
This paper presents an investigation on the humidity sensitivity of deposited multi-walled carbon nanotube (MWCNT) networks using ac dielectrophoresis (DEP) between interdigitated electrodes (IDEs). MWCNTs dispersed in ethanol were trapped and enriched between IDEs on a Si/SiO2 substrate under a positive DEP force. After the DEP process, the ethanol was evaporated and the MWCNT network on a substrate with IDEs was put into a furnace for repeated thermal annealing. It was found that the resistance stability of the network was effectively improved through thermal annealing. The humidity sensitivity was obtained by measuring the resistance of the MWCNT network with different relative humidity at room temperature. The experimental results show the resistance increases linearly with increasing the relative humidity from 25% to 95% RH with a sensitivity of 0.5%/% RH. The MWCNT networks have a reversible humidity sensing capacity with response time and recovery time of about 3 s and 25 s, respectively. The resistance is dependent on temperature with a negative coefficient of about -0.33%/K in a temperature range from 293 K to 393 K.
Year
DOI
Venue
2009
10.3390/s90301714
SENSORS
Keywords
Field
DocType
Humidity sensitivity,Multi-walled carbon nanotubes,Dielectrophoresis,Thermal annealing
Substrate (chemistry),Nanotechnology,Analytical chemistry,Dielectrophoresis,Atmospheric temperature range,Humidity,Relative humidity,Annealing (metallurgy),Chemical engineering,Carbon nanotube,Engineering,Electrode
Journal
Volume
Issue
ISSN
9
3
1424-8220
Citations 
PageRank 
References 
8
1.60
0
Authors
6
Name
Order
Citations
PageRank
Litao Liu181.60
Xiongying Ye2104.50
Kang Wu3103.49
Rui Han4144.10
Zhao-ying Zhou56314.95
Tianhong Cui6123.32