Title
1-D Cell Generation With Printability Enhancement
Abstract
process technologies advance to the subwavelength era, the 1-D design style is regarded as one of the most effective ways to continue scaling down the minimum feature size. To improve the printability of 1-D cell design, it is essential to insert dummy patterns and optimize line-end gap distribution for each layer. This paper presents novel 1-D cell generation algorithms that simultaneously minimize 1-D cell area and enhance the printability. Experimental results show that the proposed algorithms can effectively and efficiently reduce the number of diffusion gaps, minimize used routing tracks, insert sufficient dummy patterns, and eliminate stage-like line-end gaps without power and timing overhead. Consequently, the 1-D cell area is minimized and the printability of the cell is enhanced. To the best of our knowledge, this is also the first work in the literature that considers line-end gap distribution during 1-D cell generation.
Year
DOI
Venue
2013
10.1109/TCAD.2012.2226454
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Keywords
DocType
Volume
transistor placement and routing,1d cell generation,1d design style,lithography-aware cell generation,gridded design rule,cell generation,line-end gap distribution optimization,lithography,integrated circuit design,printability enhancement
Journal
32
Issue
ISSN
Citations 
3
0278-0070
5
PageRank 
References 
Authors
0.47
11
7
Name
Order
Citations
PageRank
Po-Hsun Wu1526.05
Mark Po-Hung Lin216516.87
Tung-Chieh Chen348627.19
Tsung-Yi Ho4106195.20
Yu-Chuan Chen581.23
Shun-Ren Siao650.47
Shu-Hung Lin770.84