Title
A 8-Resistor Su-8 Accelerometer With Reduced Cross Axis Sensitivity
Abstract
The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the x-axis and y-axis cross sensitivity by 2 orders of magnitude compared to the conventional 4-resistor Wheatstone-bridge arrangement.
Year
DOI
Venue
2010
10.1109/APCCAS.2010.5775073
PROCEEDINGS OF THE 2010 IEEE ASIA PACIFIC CONFERENCE ON CIRCUIT AND SYSTEM (APCCAS)
Keywords
Field
DocType
polymers,resistors,sensitivity,accelerometers,acceleration
Orders of magnitude (numbers),Proof mass,Microelectromechanical systems,Accelerometer,Computer science,Electronic engineering,Resistor,Acceleration,Electrical engineering
Conference
Citations 
PageRank 
References 
0
0.34
0
Authors
3
Name
Order
Citations
PageRank
Prasenjit Ray120.89
V. Ramgopal Rao22010.28
Prakash R. Apte301.69