Title
Multiobjective scheduling for semiconductor manufacturing plants
Abstract
Scheduling of semiconductor wafer manufacturing system is identified as a complex problem, involving multiple and conflicting objectives (minimization of facility average utilization, minimization of waiting time and storage, for instance) to simultaneously satisfy. In this study, we propose an efficient approach based on an artificial neural network technique embedded into a multiobjective genetic algorithm for multi-decision scheduling problems in a semiconductor wafer fabrication environment.
Year
DOI
Venue
2010
10.1016/j.compchemeng.2010.01.010
Computers & Chemical Engineering
Keywords
DocType
Volume
Discrete event simulation,Artificial neural networks,Multiobjective genetic algorithm,Semiconductor manufacturing
Journal
34
Issue
ISSN
Citations 
4
0098-1354
2
PageRank 
References 
Authors
0.41
2
4
Name
Order
Citations
PageRank
O. Baez Senties120.41
C. Azzaro-Pantel2346.37
L. Pibouleau3366.79
Serge Domenech4447.27