Title
Guest Editors' Introduction: Opportunities and Challenges of 3D Integration
Abstract
Interest in 3D integration is being renewed as researchers face challenges from the complexities, and cost, of scaling to 22 nm and beyond. Innovative device structures such as finFET, and extremely thin fully depleted silicon-on-insulator (ETSOI), must be deployed to continue scaling. Even with those structures, however, customary performance gains can no longer be achieved without also incurring an unacceptable increase in power. The cost of technology development in the nanoscale domain can run into the billions because massive lithographic retooling is required to cross the 22-nm barrier. The chip industry, therefore, is actively pursuing 3D integration as a viable alternative to provide density scaling. This special issue presents four articles on topics addressing some of these challenges.
Year
DOI
Venue
2009
10.1109/MDT.2009.115
IEEE Design & Test of Computers
Keywords
Field
DocType
massive lithographic retooling,22-nm barrier,density scaling,technology development,special issue,nanoscale domain,innovative device structure,unacceptable increase,chip industry,guest editors,customary performance gain,chip,3d ic,scalability,silicon on insulator,temperature,thermal management,bandwidth
Technology development,Computer science,Thermal management of electronic devices and systems,Electronic engineering,Chip,Bandwidth (signal processing),Three-dimensional integrated circuit,Scaling,Scalability
Journal
Volume
Issue
ISSN
26
5
0740-7475
Citations 
PageRank 
References 
3
0.57
0
Authors
2
Name
Order
Citations
PageRank
David S. Kung116620.93
Yuan Xie26430407.00