Name
Abstract | ||
|---|---|---|
A nano laboratory-a prototype nano manufacturing system-is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nano laboratory. |
Year | DOI | Venue |
|---|---|---|
2003 | 10.1109/ROBOT.2003.1242152 | ICRA |
Keywords | Field | DocType |
nanofabrication system,nano manufacturing system,real-time measurement system,atomic force microscope cantilever,external precursor evaporation reservoir,nanotechnology,linear bearing,electron beam deposition,manufacturing systems,16 degrees of freedom,piezoresistive lever,nanorobotic manipulation system,nanotube devices,field emission scanning electron microscope,nanotube device fabrication,nanotube cold cathode,nanotube probe,mass flow sensor,measurement systems,field emission electron microscopy,carbon nanotubes,manipulators,scanning electron microscopy,nano laboratory,thermal field emission electron source,internal precursor evaporation reservoir,real-time systems,nanotube scissors,field emission,degree of freedom,real time,real time systems,carbon nanotube,atomic force microscope,measurement system | Nanotechnology,Nanotube,Cold cathode,Scanning electron microscope,Field emission microscopy,Engineering,Carbon nanotube,Field electron emission,Nano-,Piezoresistive effect | Conference |
Volume | Issue | ISSN |
3 | 1 | 1050-4729 |
ISBN | Citations | PageRank |
0-7803-7736-2 | 0 | 0.34 |
References | Authors | |
2 | 5 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Lixin Dong | 1 | 128 | 62.75 |
| Fumihito Arai | 2 | 820 | 365.24 |
| Masahiro Nakajima | 3 | 11 | 5.09 |
| Pou Liu | 4 | 12 | 3.09 |
| Toshio Fukuda | 5 | 2723 | 818.58 |