Paper Info
Title
Performance bounds for hybrid flow lines: Fundamental behavior, practical features and application to linear cluster tools
Abstract
For deterministic hybrid flow lines with multiple classes of customer and no overtaking, we develop upper bounds on the customer departure times. For this general class of systems, the bounds are the most that one can deduce; examples can be constructed where equality is achieved and where it is not. We incorporate a very general class of setups and similarly obtain upper bounds. Such hybrid flow lines are natural candidates to serve as models of cluster tools in semiconductor wafer manufacturing. We use the flow lines as a starting point for the development of approximation models for a relatively new class of cluster tools with linear flow, called linear cluster tools. The approximations include issues caused by wafer transport robots and rolling setups. The resulting approximations are of good quality; they predict the just-in-time (maximum) throughput to within about 5%. Computation requires two orders of magnitude less effort than detailed simulation. They may thus be useful for fabricator simulations.
Year
DOI
Venue
2012
10.1109/CoASE.2012.6386460
CASE
Keywords
Field
DocType
deterministic hybrid flow lines,customer classes,semiconductor wafer manufacturing,approximation theory,performance bounds,rolling setups,approximation models,customer services,wafer transport robots,industrial robots,just-in-time throughput,fabricator simulations,customer departure times,linear cluster tools,semiconductor industry,upper bound,semiconductor device modeling,manufacturing,robots,throughput
Mathematical optimization,Semiconductor device modeling,Upper and lower bounds,Flow (psychology),Approximation theory,Throughput,Engineering,Robot,Order of magnitude,Computation
Conference
ISSN
ISBN
Citations 
2161-8070
978-1-4673-0429-0
1
PageRank 
References 
Authors
0.35
7
2
Name
Order
Citations
PageRank
Kyungsu Park161.81
James R. Morrison219526.43