Title
Effect of the principal component on the PCA-based neural network model for HfO2 thin film characteristics
Abstract
Principal component analysis (PCA) based neural network models for the HfO2 thin film characteristics, such as the accumulation capacitance and the hysteresis index, grown by metal organic molecular beam epitaxy are presented. Considering the number of the principal components, the various input parameters are applied to the neural network modeling. In order to build the process model, the error back-propagation neural networks are carried out and the X-ray diffraction data are used to analyze the characteristic variation for the different process conditions and predict the response models for the characteristics. PCA is selected to reduce the dimension of the data sets. The compressed data are then used in the neural networks and those initial weights and biases are selected by Latin Hypercube sampling method. From this analysis, the effects of the principal components on the neural network models are examined.
Year
Venue
Keywords
2007
Artificial Intelligence and Applications
process model,principal component analysis,neural network,X-ray diffraction data,neural network modeling,data set,different process condition,error back-propagation neural network,HfO2 thin film characteristic,principal component,PCA-based neural network model,neural network model
DocType
Citations 
PageRank 
Conference
0
0.34
References 
Authors
0
4
Name
Order
Citations
PageRank
Young-Don Ko1124.16
Moon-Ho Ham271.76
Jae-Min Myoung3113.29
Ilgu Yun42512.28