Title
Investigating the Impact of Fill Metal on Crosstalk-Induced Delay and Noise
Abstract
In this paper, we investigate the crosstalk-induced delay and noise implications of floating and grounded fill metal generated using each of the rule-based and model-based fill placement techniques. We first examine the impact of fill metal on several interconnect test structures, which provide important insights into the performance and reliability implications of both intra-layer and inter-layer crosstalk coupling due to dummy fill. We then explore the noise and delay implications of fill metal on several large-scale designs implemented in 65 nm process technology. For the grounded fill cases, the fill metal significantly reduces crosstalk-induced delay and noise. Designs with floating fill also experience a reduction in average crosstalk-induced delay and noise, which is in contrast to the predictions of previous studies on small-scale interconnect structures.
Year
DOI
Venue
2008
10.1109/ISQED.2008.122
San Jose, CA
Keywords
Field
DocType
dummy fill,average crosstalk-induced delay,noise implication,crosstalk-induced delay,inter-layer crosstalk coupling,fill metal,model-based fill placement technique,delay implication,fill case,important insight,testing,crosstalk,noise reduction,lithography,capacitance,design for manufacturability,design for manufacture,rule based
Coupling,Interconnect test,Crosstalk,Computer science,Electronic engineering,Interconnection,Electrical engineering,Design for manufacturability
Conference
ISBN
Citations 
PageRank 
978-0-7695-3117-5
2
0.39
References 
Authors
16
3
Name
Order
Citations
PageRank
Arthur Nieuwoudt120720.59
Jamil Kawa210812.33
Yehia Massoud3772113.05