Name
Title | ||
|---|---|---|
Fabrication and testing of a novel silicon probe for micromachined surface profilers. |
Abstract | ||
|---|---|---|
In this paper, we present the fabrication and testing of a novel probe for micromechanical surface profiler with double-ended tuning forks (DETFs) resonator as the displacement-sensing element. The probe is fabricated through the standard silicon-on-glass process developed by Peking University. The frequency variation of the DETF caused by the induced axial stress is directly proportional to the input displacement. Two stages micro-leverage mechanisms are introduced for force amplification to increase the overall sensitivity. The experimental results indicate the device has a nominal resonant frequency of 54.5 kHz under atmosphere at room temperature and the overall sensitivity is approximately 359.7 Hz/μm, which shows a good agreement with the simulation value of 330 Hz/μm using ANSYS™. Furthermore, the testing results depict the variation of frequency is linear to the displacement load within the range of 10μm. © 2011 IEEE. |
Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/NEMS.2011.6017378 | NEMS |
Keywords | Field | DocType |
bonding,displacement measurement,double-ended-tuning-forks (detfs) resonator,microleverage,silicon-glass,micromachining,room temperature,process development,vibrations,resonant frequency,glass,silicon | Cylinder stress,Atmosphere,Analytical chemistry,Composite material,Surface micromachining,Resonator,Vibration,Tuning fork,Materials science,Fabrication,Silicon | Conference |
Volume | Issue | Citations |
null | null | 0 |
PageRank | References | Authors |
0.34 | 1 | 5 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Senlin Jiang | 1 | 1 | 0.96 |
| Dacheng Zhang | 2 | 32 | 12.02 |
| Longtao Lin | 3 | 2 | 2.21 |
| Zhenchuan Yang | 4 | 23 | 12.18 |
| Guizhen Yan | 5 | 34 | 12.22 |