Name
Year | DOI | Venue |
|---|---|---|
2003 | 10.1142/S146587630300212X | International Journal of Computational Engineering Science |
Keywords | Field | DocType |
anodic bonding | Nanotechnology,Wafer,Composite material,Glass fusing,Anodic bonding,Microfluidics,Capillary action,Electronic engineering,Materials science,Silicon,Fabrication,Microfabrication | Journal |
Volume | Issue | Citations |
4 | 3 | 0 |
PageRank | References | Authors |
0.34 | 0 | 3 |