Name
Abstract | ||
|---|---|---|
Atomic Fore Microscopes (AFMs) are widely used for nanoscale applications. Until recent developments these instruments were controlled in open loop or by a PID type controller. In the last decade model-based control techniques emerged for controlling AFMs, but in almost all cases the multivariable behavior was ignored. In this paper, we present a multivariable control strategy using the standard plant framework, applied to a metrological AFM, used for the calibration of transfer standards. Although this device has a low amount of coupling, we will show that multivariable control has advantages. By using multivariable control, the amount of coupling is reduced compared to decentralized control. Simulations show a significant reduction of the errors in x, y and z directions by applying multivariable control. |
Year | Venue | Keywords |
|---|---|---|
2009 | Control Conference | atomic force microscopy,multivariable control systems,three-term control,AFM,PID type controller,metrological atomic force microscope,model-based control techniques,multivariable control strategy,transfer standard calibration,Atomic force microscopy (AFM),Calibration,Identification,MIMO systems,Motion control,Transfer standards |
DocType | ISBN | Citations |
Conference | 978-3-9524173-9-3 | 0 |
PageRank | References | Authors |
0.34 | 11 | 5 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Ronde, M.J.C. | 1 | 0 | 0.34 |
| Merry, R.J.E. | 2 | 0 | 0.34 |
| marinus j g van de molengraft | 3 | 0 | 0.34 |
| Koops, K.R. | 4 | 2 | 1.05 |
| Maarten Steinbuch | 5 | 658 | 96.53 |