Title
Microfabricated breath sensor based on carbon nanotubes for respiration monitoring
Abstract
A microfabricated breath sensor based on multi-walled carbon nanotubes (MWCNTs) has been designed, developed and tested. This sensor has a simple capacitor structure, including a pair of metal electrodes fabricated by micromachining, which are then coated by a layer of carbon nanotubes. This structure takes advantage of the unique electrical property of MWCNTs in the small gap space as a function layer. It is indicated that the sensor has much higher sensitivity to the exhaled gas flow than that of bald electrodes structure with the same size. Meanwhile, the sensor can operate steadily with low supply voltage and energy consumption, avoiding ambient interference of flowing air. It also performs a remarkable response and recovery time, as well as more consistent to the exhaled gas flow. A hybrid mechanism is modeled preliminary as an explanation.
Year
DOI
Venue
2009
10.1109/NEMS.2009.5068536
NEMS
Keywords
Field
DocType
simple capacitor structure,ambient interference,multi-walled carbon nanotubes,breath sensor,higher sensitivity,microsensors,patient monitoring,function layer,respiration monitoring,microfabricated,microfabricate,mwcnt,electrical property,bald electrodes structure,microfabrication,carbon nanotubes,energy consumption,multi walled carbon nanotubes,micromachining,gas flow,microfabricated breath sensor,data mining,electrodes,ions,carbon nanotube,fluid flow,films,atmospheric modeling
Nanotechnology,Composite material,Capacitor,Surface micromachining,Voltage,Fluid dynamics,Interference (wave propagation),Carbon nanotube,Materials science,Electrode,Microfabrication
Conference
ISSN
ISBN
Citations 
2474-3747
978-1-4244-4630-8
0
PageRank 
References 
Authors
0.34
1
5
Name
Order
Citations
PageRank
Hai Liu100.34
Xiaohang Chen21059.21
Dong Xu3714.63
Zhongyu Hou400.34
Yafei Zhang534.69