Abstract | ||
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A microfabricated breath sensor based on multi-walled carbon nanotubes (MWCNTs) has been designed, developed and tested. This sensor has a simple capacitor structure, including a pair of metal electrodes fabricated by micromachining, which are then coated by a layer of carbon nanotubes. This structure takes advantage of the unique electrical property of MWCNTs in the small gap space as a function layer. It is indicated that the sensor has much higher sensitivity to the exhaled gas flow than that of bald electrodes structure with the same size. Meanwhile, the sensor can operate steadily with low supply voltage and energy consumption, avoiding ambient interference of flowing air. It also performs a remarkable response and recovery time, as well as more consistent to the exhaled gas flow. A hybrid mechanism is modeled preliminary as an explanation. |
Year | DOI | Venue |
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2009 | 10.1109/NEMS.2009.5068536 | NEMS |
Keywords | Field | DocType |
simple capacitor structure,ambient interference,multi-walled carbon nanotubes,breath sensor,higher sensitivity,microsensors,patient monitoring,function layer,respiration monitoring,microfabricated,microfabricate,mwcnt,electrical property,bald electrodes structure,microfabrication,carbon nanotubes,energy consumption,multi walled carbon nanotubes,micromachining,gas flow,microfabricated breath sensor,data mining,electrodes,ions,carbon nanotube,fluid flow,films,atmospheric modeling | Nanotechnology,Composite material,Capacitor,Surface micromachining,Voltage,Fluid dynamics,Interference (wave propagation),Carbon nanotube,Materials science,Electrode,Microfabrication | Conference |
ISSN | ISBN | Citations |
2474-3747 | 978-1-4244-4630-8 | 0 |
PageRank | References | Authors |
0.34 | 1 | 5 |
Name | Order | Citations | PageRank |
---|---|---|---|
Hai Liu | 1 | 0 | 0.34 |
Xiaohang Chen | 2 | 105 | 9.21 |
Dong Xu | 3 | 71 | 4.63 |
Zhongyu Hou | 4 | 0 | 0.34 |
Yafei Zhang | 5 | 3 | 4.69 |