Title
Improvement of the architecture for MEMS resonator quality factor measurement.
Abstract
In this paper, the performance analysis of our previously proposed architecture for MEMS resonator quality factor measurement is carried out in taking into account the imperfection of each functional block of the architecture. This analysis puts in evidence the impact of the imperfection of each functional block on the measurement precision and predicts the attainable measurement precision of this architecture. In order to improve the performance, an improved architecture is proposed, with which the measurement precision can be improved at least a factor of 2.
Year
DOI
Venue
2008
10.1109/ICECS.2008.4674839
ICECS
Keywords
Field
DocType
mathematical model,time measurement,q factor,detectors,quality factor
Architecture,Q factor,Microelectromechanical systems,Computer science,Resonator,Electronic engineering,Control engineering,Measurement precision,Detector,Electrical engineering
Conference
ISBN
Citations 
PageRank 
978-1-4244-2182-4
4
1.20
References 
Authors
1
3
Name
Order
Citations
PageRank
Ming Zhang1157.12
Nicolas Llaser2168.11
Hervé Mathias3125.30