Title
Past And Future Technology For Mixed Signal Lsi
Abstract
This paper discusses Mixed Signal LSI technology with embedded power transistors. Trends in Mixed Signal LSI technology are explained at first. Mixed signal LSI technology has proceeded with the help of fine fabrication technology and SOI technology. The BEOL transistor is a new development, which uses InGaZnO (IGZO) as its TFT channel material. The BEOL transistor is one future device which enables 3D IC and chip shrinking technology.
Year
DOI
Venue
2014
10.1587/transele.E97.C.238
IEICE TRANSACTIONS ON ELECTRONICS
Keywords
Field
DocType
Mixed Signal LSI, BiC-DMOS, analog, power IC, InGaZnO (IGZO)
Silicon on insulator,Thin-film transistor,Power semiconductor device,Communication channel,Chip,Electronic engineering,Three-dimensional integrated circuit,Engineering,Mixed-signal integrated circuit,Transistor,Electrical engineering
Journal
Volume
Issue
ISSN
E97C
4
1745-1353
Citations 
PageRank 
References 
1
0.48
0
Authors
4
Name
Order
Citations
PageRank
Kenichi Hatasako110.48
Tetsuya Nitta210.48
Masami Hane320.96
Shigeto Maegawa441.70