Name
Abstract | ||
|---|---|---|
The photolithography cluster tool is typically the most expensive tool set utilized in the production of semiconductor wafers
and is often selected as a fabricator bottleneck. Modeling such a tool as a serial processing cluster tool, we deduce measures
of tool performance. Queueing models reveal that the mean cycle time in the presence of a Poisson arrival process is related
to the parallelism inherent in the system configuration. As a consequence, the normalized mean cycle time behavior has a different
form than that of the standard single server queue. The process time of a lot and the throughput are evaluated in the presence
of disruptions common in practical manufacturing environments. For multiple products with different process rates, it is shown
that the throughput is not influenced by the order in which the lots are sequenced. |
Year | DOI | Venue |
|---|---|---|
2007 | 10.1007/s00291-006-0061-4 | Or Spektrum |
Keywords | Field | DocType |
photolithography cluster tools · queueing models · cycle time · throughput · workload sequencing,cycle time | Bottleneck,Economics,Normalization (statistics),Petri net,Serial memory processing,System configuration,Photolithography,Queueing theory,Throughput,Operations management | Journal |
Volume | Issue | ISSN |
29 | 3 | 0171-6468 |
Citations | PageRank | References |
12 | 1.63 | 1 |
Authors | ||
2 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| James R. Morrison | 1 | 195 | 26.43 |
| Donald P. Martin | 2 | 23 | 3.35 |