Paper Info
Title
Micromachined interferometric accelerometer fabricated using SGADER process
Abstract
We presents a micromachined interferometric accelerometer fabricated using Silicon Glass Anodic-bonding and Deep Etching Release (SGADER) process. The accelerometer consists of a glass-silicon-glass sandwich structure. A proof mass is suspended by beams attached to the silicon support substrate and a diffraction grating on the bottom glass substrate resides under the proof mass. The sandwich structure and the protection stoppers on the proof mass can protect the support beams from damage induced by large acceleration. Illuminating the grating with collimated laser generates diffracted beams. The displacement between the proof mass and the grating is detected by measuring the intensity of the first order diffracted beam. The accelerometer was tested using a turntable. The acceleration resolution is better than 34 mug, and the sensitivity is about 147 V/g.
Year
DOI
Venue
2009
10.1109/NEMS.2009.5068755
NEMS
Keywords
Field
DocType
interferometric,bottom glass substrate resides,micromachined interferometric accelerometer,proof mass,acceleration resolution,order diffracted beam,interferometry,diffraction gratings,accelerometer,silicon support substrate,bonding processes,silicon glass anodic-bonding,protection stoppers,mems,sandwich structure,sgader process,silicon,diffracted beam,deep etching release,diffraction grating,sio2-si-sio2,accelerometers,sandwich,elemental semiconductors,etching,large acceleration,glass,sio2,glass-silicon-glass sandwich structure,optical interferometry,first order,noise,acceleration
Proof mass,Grating,Microelectromechanical systems,Accelerometer,Optics,Diffraction grating,Acceleration,Diffraction,Materials science,Collimated light
Conference
ISSN
ISBN
Citations 
2474-3747
978-1-4244-4630-8
0
PageRank 
References 
Authors
0.34
0
6
Name
Order
Citations
PageRank
Kang Wu1103.49
Xiongying Ye2104.50
Feng Chen300.34
Litao Liu400.34
Linrui Guo500.34
Zhao-ying Zhou66314.95