Name
Title | ||
|---|---|---|
Simple sticking models and adhesion criterion to predict sticking effects of fixed-fixed beams in RF MEMS switch design. |
Abstract | ||
|---|---|---|
The fixed-fixed beam in RF switches fabricated by MEMS techniques of a sacrificial layer is inclined to stick to the substrate due to the significant capillary force during drying process. In this paper, sticking models of the fixed-fixed beam are investigated to analyze the sticking effect. Based on these models, an adhesion criterion h c for the fixed-fixed beam is derived to determine whether the beam sticks to the substrate or not. The deduced formula shows that h c is determined by the material property of the beam and its length L and thickness t. It is also found that the width of the beam has no effect on h c. The theoretical models and adhesion criterion are simulated and verified by Finite Element Analysis. The effects of residual stress are also discussed to meet the uncertainty of real fabrication processes. ©2010 IEEE. |
Year | DOI | Venue |
|---|---|---|
2010 | 10.1109/NEMS.2010.5592597 | NEMS |
Keywords | Field | DocType |
fixed-fixed beam,mems,rf switch,sticking effect,material properties,adhesives,finite element analysis,adhesion,mathematical model,drying,force,microfabrication,residual stress,residual stresses,radio frequency | Composite material,Microelectromechanical systems,Capillary action,Finite element method,Residual stress,Beam (structure),RF switch,Materials science,Fabrication,Microfabrication | Conference |
Volume | Issue | Citations |
null | null | 0 |
PageRank | References | Authors |
0.34 | 0 | 5 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Yu Hui | 1 | 1 | 1.06 |
| Kai Yang | 2 | 0 | 0.68 |
| Binbin Jiao | 3 | 0 | 0.34 |
| Yupeng Jing | 4 | 0 | 1.01 |
| Dapeng Chen | 5 | 190 | 7.85 |