Name
Abstract | ||
|---|---|---|
A prealigner is an equipment of moving a wafer so that it is set at the desired position and orientation. In this paper, a 12-inch wafer prealigner that can recognize optical characters on a 12-inch wafer and generate smooth velocity command profiles for motors is proposed and developed. The recognition of optical characters on a 12-inch wafer makes it possible to manage each 12-inch wafer individually, which is required in processing a 12-inch wafer due to its cost. Also, since smooth velocity command profiles have small jerks, they may make better precision or shorter time in aligning a wafer. |
Year | DOI | Venue |
|---|---|---|
2003 | 10.1016/S0141-9331(02)00105-9 | Microprocessors and Microsystems |
Keywords | Field | DocType |
Prealigner,12-inch wafer,Optical character recognition,Velocity command | Wafer,Computer science,Optical character recognition,Electrical engineering | Journal |
Volume | Issue | ISSN |
27 | 4 | 0141-9331 |
Citations | PageRank | References |
2 | 0.66 | 2 |
Authors | ||
5 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Hee-Sub Lee | 1 | 13 | 3.18 |
| Jae Wook Jeon | 2 | 565 | 77.35 |
| Joonwoo Kim | 3 | 3 | 1.01 |
| Sung-Jong Jung | 4 | 2 | 0.66 |
| Jong-Eun Byun | 5 | 35 | 3.62 |