Name
Title | ||
|---|---|---|
Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes |
Abstract | ||
|---|---|---|
This paper reports a novel process which is combine the contact metal transfer method and traditional photolithography process for fabricate nano-scale pattern sapphire substrate (NPSS) used in high brightness light emitting diodes (LEDs). The novel process can directly transfer a metal pattern onto the PR layer which above the sapphire substrate, the transferred metal pattern can as a perfect photo-mask for subsequent photolithography process. In this work, the high aspect ratio PR structures with the aspect ratio of 5 and line width of 500 nm are created by this novel process. Furthermore, the PR structure can as a etching mask for inductively coupled plasma (ICP) etching on the sapphire substrate. During the ICP etching, we successfully to obtain the NPSS with a perfect cone shape. Experiments have been demonstrate the feasibility of using this new approach for obtaining sub-micrometer surface structures on the complete surface area of a 2 inch and 4 inch sapphire substrates. |
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/NEMS.2012.6196718 | NEMS |
Keywords | Field | DocType |
size 4 inch,nanoscale pattern sapphire substrate fabrication,metal pattern,photolithography,sputter etching,metal contact printing photolithography,etching mask,contact metal transfer method,metal contact printing,sapphire,metals,leds,masks,submicrometer patterned sapphire substrate fabrication,npss,size 500 nm,light emitting diodes,photo-mask,size 2 inch,light-emitting diode,inductively coupled plasma etching,high aspect ratio,inductive coupled plasma,aspect ratio,surface area,surface structure,light emitting diode,photo mask,heating,films | Contact print,Etching,Inductively coupled plasma,Optics,Photolithography,Light-emitting diode,Sapphire,Optoelectronics,Micrometer,Materials science,Silicon on sapphire | Conference |
ISBN | Citations | PageRank |
978-1-4673-1122-9 | 0 | 0.34 |
References | Authors | |
0 | 2 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Yi-Ta Hsieh | 1 | 0 | 2.03 |
| Yung-Chun Lee | 2 | 5 | 5.73 |