Title
Numerical prototyping methods in microsystem accelerometers design
Abstract
The authors of this research would like to present the numerical prototyping methods in reference to design of microsystem silicon accelerometer. As an example device the capacitive accelerometer was taken into account. The accelerometer was prepared as a FEM parametric model. The model was then processed by the numerical optimization algorithms in order to find the optimal design parameters. For this purpose, the so-called numerical multi-objective optimization process was carried out. The idea was to find the optimal solution in reference to more than one optimizing criterion. As a result the set of optimal solutions was obtained and this method seems to be promising for similar purposes.
Year
DOI
Venue
2011
10.1016/j.microrel.2011.03.017
Microelectronics Reliability
Keywords
Field
DocType
multi objective optimization,parametric model,optimal design
Microsystem,Parametric model,Accelerometer,Circuit design,Electronic engineering,Control engineering,Finite element method,Optimal design,Engineering,Numerical analysis,Virtual prototyping
Journal
Volume
Issue
ISSN
51
7
0026-2714
Citations 
PageRank 
References 
1
0.54
1
Authors
4
Name
Order
Citations
PageRank
Lukasz Dowhan131.74
Artur Wymyslowski254.31
Stanisław Kaliciński341.64
Pawel Janus411.22