Name
Abstract | ||
|---|---|---|
This paper presents design of a high-g 8-beam piezoresistive micro-accelerometer. Based on mechanics of materials and vibration theory, an analytical model of symmetric beam-mass structure is established to obtain the structural parameters of the micro-accelerometer. Then, finite element method in ANSYS is used to make a 3-dimensional analysis, and results obtained are in good agreement with those from the analytical model. In the end, piezo-resistors of the micro-accelerometer are laid out and sensitivity is discussed. |
Year | DOI | Venue |
|---|---|---|
2010 | 10.1109/NEMS.2010.5592270 | NEMS |
Keywords | Field | DocType |
high-g accelerometer,piezoresistive devices,three axis accelerometer,symmetric beam-mass structure,vibrations,piezoresistive micro-accelerometer,microsensors,beams (structures),material mechanics,accelerometers,vibration theory,varistors,acceleration,stress,3 dimensional,finite element method,sensitivity,finite element methods | Strength of materials,Composite material,Accelerometer,Finite element method,Piezoresistive accelerometer,Vibration theory of olfaction,Acceleration,Vibration,Materials science,Piezoresistive effect,Structural engineering | Conference |
Volume | Issue | ISBN |
null | null | 978-1-4244-6543-9 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Liwei Lin | 1 | 122 | 28.76 |
| Feng Pan | 2 | 33 | 7.13 |
| Jiashan Xu | 3 | 0 | 1.35 |
| Hang Guo | 4 | 2 | 5.48 |