Paper Info
Title
Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM
Abstract
For MEMS combdrive performance, the calculation of levitating force due to electrostatic field is very important, and an accurate electrostatic analysis is essential. Because the gap size between combdrive fingers and ground plane or movable finger and fixed finger, plays a very important role for levitation, a study of the effect of gap size variation is indispensable. For diverse gaps of MEMS comdrive design, the dual BEM (DBEM) has become a better method than the domain-type FEM because DBEM can provide a complete solution in terms of boundary values only, with substantial saving in modeling effort, hence the DBEM was used to simulate the fringing of field around the edges of the fixed finger and movable finger of MEMS combdrive for diverse gap size. Results show that the less the gaps between combdrive fingers and ground plane are, the larger the levitating force acting on the movable finger is. In addition, the levitating force becomes more predominant as the gaps between movable finger and fixed finger decrease. By way of DBEM presented in this article, an accurate electrostatic field can be obtained, and the follow-up control method of levitation force for MEMS combdrive can be implemented more precisely.
Year
DOI
Venue
2004
10.1016/j.mejo.2004.06.005
Microelectronics Journal
Keywords
Field
DocType
MEMS,Levitating force,Electrostatic,DBEM,FEM,MEMS,Combdrive
Electric field,Microelectromechanical systems,Computer simulation,Waveform,Mechanical engineering,Ground plane,Finite element method,Electronic engineering,Levitation,Boundary element method,Engineering,Electrical engineering
Journal
Volume
Issue
ISSN
35
9
0026-2692
Citations 
PageRank 
References 
0
0.34
2
Authors
3
Name
Order
Citations
PageRank
Shiang-Woei Chyuan131.36
Yunn-Shiuan Liao231.02
Jeng-Tzong Chen3218.46