Abstract | ||
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This paper reports a new strip-patterned integrated inductor that actively engages metal filling rules leading to reduced manufacturing cost and process-induced uncertainties while simultaneously maintaining state-of-the-art performance. The strip-patterned inductor consists of parallel horse shoe-shape metal lines in the foot print of a single-line inductor. It observes back-end-of-line (BEOL) metal density rules by design, and it is not subject to a post-layout patterning to enforce metal density on a large piece of metal. As a result, better model-to-hardware correlation (MHC) is expected. The new inductor structure is backed by experimental and simulated results that demonstrate the design methodology in the presence of process uncertainties typically not known to the circuit designer. |
Year | DOI | Venue |
---|---|---|
2007 | 10.1109/CICC.2007.4405726 | CICC |
Keywords | Field | DocType |
horse shoe-shape metal lines,model-to-hardware correlation,single-line inductor,metal filling rules,size 65 nm,integrated circuit metallisation,process-induced uncertainty,strip-patterned integrated inductor,post-layout patterning,manufacturing cost,back-end-of-line metal density rules,inductors,circuit design,design methodology | Manufacturing cost,Computer science,Circuit design,Inductor,Design methods,Electronic engineering | Conference |
ISBN | Citations | PageRank |
978-1-4244-1623-3 | 1 | 0.37 |
References | Authors | |
0 | 6 |
Name | Order | Citations | PageRank |
---|---|---|---|
Jeong-Il Kim | 1 | 1 | 0.37 |
Daeik D. Kim | 2 | 27 | 5.49 |
Jonghae Kim | 3 | 101 | 14.95 |
Choongyeun Cho | 4 | 40 | 6.76 |
Byunghoo Jung | 5 | 160 | 26.43 |
Dimitrios Peroulis | 6 | 179 | 20.38 |